Classification of different post-hyperdoping treatments for enhanced crystallinity of IR-sensitive femtosecond-laser processed silicon

Crystalline silicon becomes photosensitive and absorbing in the sub-bandgap spectral region if hyperdoped, i.e. supersaturated to a level above the solubility limit in thermal equilibrium, by deep impurities, such as sulfur. Here we apply femtosecond laserpulses to crystalline silicon in a SF 6 atmo...

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Veröffentlicht in:	Semiconductor science and technology 2023-02, Vol.38 (2), p.24002
Hauptverfasser:	Paulus, Simon, Roser, Michael, McKearney, Patrick, Will, Matthias, Schäfer, Sören, Kontermann, Stefan
Format:	Artikel
Sprache:	eng
Schlagworte:	annealing crystallinity etching femtosecond laser hyperdoping sub-bandgap
Online-Zugang:	Volltext
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