On the importance of excited state species in low pressure capacitively coupled plasma argon discharges

In the past three decades, first principles-based fully kinetic particle-in-cell Monte Carlo collision (PIC/MCC) simulations have been proven to be an important tool for the understanding of the physics of low pressure capacitive discharges. However, there is a long-standing issue that the plasma de...

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Veröffentlicht in:	Plasma sources science & technology 2023-06, Vol.32 (6), p.64001
Hauptverfasser:	Wen, De-Qi, Krek, Janez, Gudmundsson, Jon Tomas, Kawamura, Emi, Lieberman, Michael A, Zhang, Peng, Verboncoeur, John P
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY electron dynamics electron-induced secondary electron yield excited state atoms low pressure capacitively coupled plasmas Physics plasma-surface interaction resonance photons simulation validation against experiments
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