Electron sink on the Langmuir probe in plasma, its influence on measurements and methods to account for it

The influence of the electron sink effect on the probe on the results of measurements of the electron energy distribution functions (EEDFs), plasma potential, and electron concentration was studied. The studies were carried out for helium in a discharge with a hollow cathode at a gas pressure of

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Veröffentlicht in:	Plasma sources science & technology 2021-09, Vol.30 (9), p.95004, Article 095004
Hauptverfasser:	Andreev, S N, Bernatskiy, A V, Dyatko, N A, Kochetov, I V, Ochkin, V N
Format:	Artikel
Sprache:	eng
Schlagworte:	drain effect electron energy distribution electron energy distribution function hollow cathode Langmuir probe nonlocal kinetics Physical Sciences Physics Physics, Fluids & Plasmas Science & Technology sink effect
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Beschreibung
Zusammenfassung:	The influence of the electron sink effect on the probe on the results of measurements of the electron energy distribution functions (EEDFs), plasma potential, and electron concentration was studied. The studies were carried out for helium in a discharge with a hollow cathode at a gas pressure of
ISSN:	0963-0252 1361-6595
DOI:	10.1088/1361-6595/ac1ee2