Theoretical investigation of a miniature microwave driven plasma jet

Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP u...

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Veröffentlicht in:	Plasma sources science & technology 2020-06, Vol.29 (6), p.65018
Hauptverfasser:	Klute, Michael, Porteanu, Horia-Eugen, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	ICP inductively microwave miniature plasma jet
Online-Zugang:	Volltext
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