Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

A thorough understanding of the energy transfer mechanism from the electric field to electrons is of utmost importance for optimisation and control of different plasma sources and processes. This mechanism, called electron power absorption, involves complex electron dynamics in electronegative capac...

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Veröffentlicht in:	Plasma sources science & technology 2020-02, Vol.29 (2), p.25019
Hauptverfasser:	Vass, Máté, Wilczek, Sebastian, Lafleur, Trevor, Brinkmann, Ralf Peter, Donkó, Zoltán, Schulze, Julian
Format:	Artikel
Sprache:	eng
Schlagworte:	capacitively coupled plasma electron power absorption particle-in-cell simulation
Online-Zugang:	Volltext
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