Hybrid metrology for nanometric energy harvesting devices

The parametrization of the nanostructures covering the energy harvesting (EH) devices play an important role in maximizing the exploitation of light and so does the selection of the best suitable fabrication and measurement methods. The fabrication and optical inspection of periodic cylindrical nanostructures for EH devices is a challenging task for both manufacturers and metrologists. In this paper we present the fabrication process of nanowires (NWs) along with optical and non-optical measurement techniques which were used to measure the geometrical parameters of these periodic nanostructures. The paper explains the benefits of hybrid metrology that combine data from different metrology tools to obtain more accurate dimensional information about the measured NW samples than those which can be achieved by using only one metrology instrument and thereby improve the fabrication process. Measurement procedure and the determination of geometrical parameters achieved with uncertainties down to 2 nm are provided in the paper and discussed in detail.