Experimental evaluation of uncertainty in sub-nanometer metrology using transmission electron microscopy due to magnification variation

Uncertainties due to the magnification variation in sub-nanometer metrology using transmission electron microscopy (TEM) were experimentally evaluated by comparing the measured values of the (220) lattice spacing of a crystalline Si specimen acquired under various conditions. Interday variation of t...

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Veröffentlicht in:	Measurement science & technology 2021-09, Vol.32 (9), p.95011
Hauptverfasser:	Kobayashi, Keita, Misumi, Ichiko, Yamamoto, Kazuhiro
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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