Development of scanning capacitance force microscopy using the dissipative force modulation method

We have developed scanning capacitance force microscopy (SCFM) using the dissipative force in frequency-modulation atomic force microscopy. An SCFM signal depends on the dopant density and polarity of semiconductors, whose evaluation is important for developing electronic devices. Thus, improving th...

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Veröffentlicht in:	Measurement science & technology 2020-03, Vol.31 (3), p.35904
Hauptverfasser:	Uruma, Takeshi, Satoh, Nobuo, Yamamoto, Hidekazu, Iwata, Futoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Kelvin probe force microscopy scanning capacitance force microscopy scanning probe microscopy
Online-Zugang:	Volltext
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