From amorphous to nanocrystalline: the effect of nanograins in an amorphous matrix on the thermal conductivity of hot-wire chemical-vapor deposited silicon films

We have measured the thermal conductivity of amorphous and nanocrystalline silicon films with varying crystalline content from 85 K to room temperature. The films were prepared by the hot-wire chemical-vapor deposition, where the crystalline volume fraction is determined by the hydrogen (H2) dilutio...

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Veröffentlicht in:	Journal of physics. Condensed matter 2018-02, Vol.30 (8), p.085301-085301
Hauptverfasser:	Kearney, B T, Jugdersuren, B, Queen, D R, Metcalf, T H, Culbertson, J C, Desario, P A, Stroud, R M, Nemeth, W, Wang, Q, Liu, Xiao
Format:	Artikel
Sprache:	eng
Schlagworte:	amorphous silicon chemical vapor deposition nanocrystalline silicon nanoscale phonon scattering thermal conductivity
Online-Zugang:	Volltext
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