Atomic scale smoothing of nanoscale quartz mold using amorphous carbon films

Surface roughness control of end products is increasingly becoming significant, especially with the miniaturization trends in the semiconductor industry. Ultra-thin amorphous carbon (a-C) films offer a prime solution to optimize surface roughness due to their outstanding characteristics. In this stu...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2024-11, Vol.57 (45), p.455202
Hauptverfasser:	Farghali, Abdelrahman, Iwasa, Kazutoki, Kim, Jongduk, Choi, Junho
Format:	Artikel
Sprache:	eng
Schlagworte:	amorphous carbon film MD simulation quartz mold surface smoothing
Online-Zugang:	Volltext
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