Spatially averaged ion temperature model for low-temperature plasma sources

Although the ion temperature can considerably affect bulk plasma parameters and ion angle distribution functions arriving at the substrate, limited experiments have been conducted on this phenomenon because ion temperature measurement is difficult. Furthermore, only a few simulations have been perfo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2022-10, Vol.55 (41), p.415205
Hauptverfasser:	Kwon, Deuk-Chul, Yook, Yeong-Geun, Chung, Sang-Young, Chang, Won-Seok, Yu, Dong-Hun, Im, Yeon-Ho
Format:	Artikel
Sprache:	eng
Schlagworte:	global model ion angle distribution ion temperature low temperature plasma
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!