Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities

Very high frequency (VHF) driven capacitive discharges are now being increasingly adopted for plasma-based materials processing due to their high processing rates and lower substrate damage. Past studies related to complex plasma dynamics and higher harmonics generation in such systems were limited...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2021-02, Vol.54 (5), p.55205
Hauptverfasser:	Sharma, Sarveshwar, Sirse, Nishant, Kuley, Animesh, Sen, Abhijit, Turner, Miles M
Format:	Artikel
Sprache:	eng
Schlagworte:	capacitive discharges collisionless electron energy distribution function ion energy distribution function particle-in-cell simulation very high frequency
Online-Zugang:	Volltext
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