Substrate orientation effects on nanoelectrode lithography: ReaxFF molecular dynamics and experimental study

The crystallographic orientation of the substrate is an essential parameter in the kinetic mechanism for the oxidation process. Hence, the choice of substrate surface orientation is crucial in nanofabrication industries. In the present work, we have studied qualitatively the influence of substrate o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2020-07, Vol.53 (29), p.295108
Hauptverfasser:	Murad Hasan, Rashed Md, Politano, Olivier, Luo, Xichun
Format:	Artikel
Sprache:	eng
Schlagworte:	activation energy chemical composition crystallographic orientation electric field intensity oxidation ReaxFF MD
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!