Physics-guided machine-learning enhanced electrostatic actuated method for in-situ measurement of Young’s modulus

Young’s modulus of polysilicon is a vital mechanical parameter highly dependent on sample preparation and growth techniques. In-situ measurement of this property is essential for effective process control monitoring in microelectromechanical systems (MEMS) fabrication. In this work, an innovative el...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2025-02, Vol.35 (2), p.25002
Hauptverfasser:	Liang, Zhi-peng, Zhao, Lin-Feng, Zhou, Zai-Fa, Huang, Qing-An
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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