An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators

This work investigates a co-design approach for fundamental symmetric Lamb wave (S 0 ) resonators (LWR) and film bulk acoustic wave resonators (FBAR) in a commercial 8-inch aluminum nitride (AlN) microelectromechanical system (MEMS) platform to enable multi-band operation. The platform utilizes surf...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2023-05, Vol.33 (5), p.54001
Hauptverfasser:	Hsu, Tzu-Hsuan, Tung, Shao-Siang, Huang, Yan-Ming, Wu, Guan-Lin, Chang, Chin-Yu, Ho, Yens, Chen, Yung-Hsiang, Pradeep, Yelehanka, Chand, Rakesh, Li, Ming-Huang
Format:	Artikel
Sprache:	eng
Schlagworte:	aluminum nitride electromechanical coupling factor film bulk acoustic wave resonator Lamb wave resonator mode predefined acoustic boundary quality factor
Online-Zugang:	Volltext
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