Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor

In this article, a dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal source pocket tunnel field-effect transistor (DM-TMGOS-ZHP-TFET) structure has been investigated for the application of label free-biosensor. This work explores the advantage of gate work function engineer...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of micromechanics and microengineering 2022-08, Vol.32 (8), p.85001
Hauptverfasser: Reddy, Nelaturi Nagendra, Panda, Deepak Kumar
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue 8
container_start_page 85001
container_title Journal of micromechanics and microengineering
container_volume 32
creator Reddy, Nelaturi Nagendra
Panda, Deepak Kumar
description In this article, a dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal source pocket tunnel field-effect transistor (DM-TMGOS-ZHP-TFET) structure has been investigated for the application of label free-biosensor. This work explores the advantage of gate work function engineering along with the gate-oxide-stack approach for the ZHP-TFET for the first time. An asymmetric nano-cavity is created adjacent to the source-channel junction to immobilize the target biomolecules conjugation to the proposed device. The sensitivity of the device is thoroughly investigated in terms of average subthreshold swing (SS), threshold voltage ( V th ) and the switching ratio ( I on / I off ) of the proposed device with the variation of the dielectric constant value inside the nano-gap under the gate electrode. The device characteristics are investigated with different combinations of metal work functions to match the desired feature and sensitivity of the device. In addition, the sensitivity analysis of the proposed device is analyzed in the presence of both positive and negative charged biomolecules in the cavity region to study the charge effect on label-free detection of the device. A comparative study is conducted between a single metal gate (SMG) ZHP-DM-TFET biosensor with the DM-TMGOS-ZHP-TFET biosensor explores the advantage of gate-work function engineering with a gate-oxide-stack approach. Interestingly the DM-TMGOS-ZHP-TFET biosensor shows superior results with a high current ratio sensitivity of 10 3 which is ten times more than the SMG-ZHP-DM-TFET biosensor and this device also exhibits low subthreshold characteristics.
doi_str_mv 10.1088/1361-6439/ac7773
format Article
fullrecord <record><control><sourceid>iop_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1088_1361_6439_ac7773</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>jmmac7773</sourcerecordid><originalsourceid>FETCH-LOGICAL-c242t-7fb2fdb4f884e5701e1d518a83506f509f5b703c6fd8100b879627843c241d793</originalsourceid><addsrcrecordid>eNp1kE1PxCAQhonRxPXj7pGbF1EobaFH43di4kUvXgiFYZe1LQ1Uo_4Of7A0azzpaTIzzzuZPAgdMXrKqJRnjNeM1CVvzrQRQvAttPgdbaMFbWpKGGdiF-2ltKaUMcnkAn1dQvLLAevBYj-8QZr8Uk8-DDg4bD10YKboDe6Dfe30BBbnduwA9zDpDmcWSHj3FkiatHnBzySt9JixeYNXIfrPMMzkGMwLTPjx-uoRW3jzBrBOWONOt9ARFwFw60OCIYV4gHac7hIc_tR99JRjF7fk_uHm7uL8npiiLCYiXFs425ZOyhIqQRkwWzGpJa9o7SrauKoVlJvaWckobaVo6kLIkuc4s6Lh-4hu7poYUorg1Bh9r-OHYlTNVtWsUM0K1cZqjhxvIj6Mah1e45AfVOu-V7xQUlFZZbVqtC6TJ3-Q_x7-BnySh4E</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Reddy, Nelaturi Nagendra ; Panda, Deepak Kumar</creator><creatorcontrib>Reddy, Nelaturi Nagendra ; Panda, Deepak Kumar</creatorcontrib><description>In this article, a dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal source pocket tunnel field-effect transistor (DM-TMGOS-ZHP-TFET) structure has been investigated for the application of label free-biosensor. This work explores the advantage of gate work function engineering along with the gate-oxide-stack approach for the ZHP-TFET for the first time. An asymmetric nano-cavity is created adjacent to the source-channel junction to immobilize the target biomolecules conjugation to the proposed device. The sensitivity of the device is thoroughly investigated in terms of average subthreshold swing (SS), threshold voltage ( V th ) and the switching ratio ( I on / I off ) of the proposed device with the variation of the dielectric constant value inside the nano-gap under the gate electrode. The device characteristics are investigated with different combinations of metal work functions to match the desired feature and sensitivity of the device. In addition, the sensitivity analysis of the proposed device is analyzed in the presence of both positive and negative charged biomolecules in the cavity region to study the charge effect on label-free detection of the device. A comparative study is conducted between a single metal gate (SMG) ZHP-DM-TFET biosensor with the DM-TMGOS-ZHP-TFET biosensor explores the advantage of gate-work function engineering with a gate-oxide-stack approach. Interestingly the DM-TMGOS-ZHP-TFET biosensor shows superior results with a high current ratio sensitivity of 10 3 which is ten times more than the SMG-ZHP-DM-TFET biosensor and this device also exhibits low subthreshold characteristics.</description><identifier>ISSN: 0960-1317</identifier><identifier>EISSN: 1361-6439</identifier><identifier>DOI: 10.1088/1361-6439/ac7773</identifier><identifier>CODEN: JMMIEZ</identifier><language>eng</language><publisher>IOP Publishing</publisher><subject>biosensor ; gate-oxide-stack (GOS) ; gate-work function engineering ; label-free detection ; triple metal gate ; tunnel FET (TFET) ; Z-shaped gate</subject><ispartof>Journal of micromechanics and microengineering, 2022-08, Vol.32 (8), p.85001</ispartof><rights>2022 IOP Publishing Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c242t-7fb2fdb4f884e5701e1d518a83506f509f5b703c6fd8100b879627843c241d793</citedby><cites>FETCH-LOGICAL-c242t-7fb2fdb4f884e5701e1d518a83506f509f5b703c6fd8100b879627843c241d793</cites><orcidid>0000-0001-8835-3908</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/1361-6439/ac7773/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,776,780,27901,27902,53821,53868</link.rule.ids></links><search><creatorcontrib>Reddy, Nelaturi Nagendra</creatorcontrib><creatorcontrib>Panda, Deepak Kumar</creatorcontrib><title>Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor</title><title>Journal of micromechanics and microengineering</title><addtitle>JMM</addtitle><addtitle>J. Micromech. Microeng</addtitle><description>In this article, a dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal source pocket tunnel field-effect transistor (DM-TMGOS-ZHP-TFET) structure has been investigated for the application of label free-biosensor. This work explores the advantage of gate work function engineering along with the gate-oxide-stack approach for the ZHP-TFET for the first time. An asymmetric nano-cavity is created adjacent to the source-channel junction to immobilize the target biomolecules conjugation to the proposed device. The sensitivity of the device is thoroughly investigated in terms of average subthreshold swing (SS), threshold voltage ( V th ) and the switching ratio ( I on / I off ) of the proposed device with the variation of the dielectric constant value inside the nano-gap under the gate electrode. The device characteristics are investigated with different combinations of metal work functions to match the desired feature and sensitivity of the device. In addition, the sensitivity analysis of the proposed device is analyzed in the presence of both positive and negative charged biomolecules in the cavity region to study the charge effect on label-free detection of the device. A comparative study is conducted between a single metal gate (SMG) ZHP-DM-TFET biosensor with the DM-TMGOS-ZHP-TFET biosensor explores the advantage of gate-work function engineering with a gate-oxide-stack approach. Interestingly the DM-TMGOS-ZHP-TFET biosensor shows superior results with a high current ratio sensitivity of 10 3 which is ten times more than the SMG-ZHP-DM-TFET biosensor and this device also exhibits low subthreshold characteristics.</description><subject>biosensor</subject><subject>gate-oxide-stack (GOS)</subject><subject>gate-work function engineering</subject><subject>label-free detection</subject><subject>triple metal gate</subject><subject>tunnel FET (TFET)</subject><subject>Z-shaped gate</subject><issn>0960-1317</issn><issn>1361-6439</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNp1kE1PxCAQhonRxPXj7pGbF1EobaFH43di4kUvXgiFYZe1LQ1Uo_4Of7A0azzpaTIzzzuZPAgdMXrKqJRnjNeM1CVvzrQRQvAttPgdbaMFbWpKGGdiF-2ltKaUMcnkAn1dQvLLAevBYj-8QZr8Uk8-DDg4bD10YKboDe6Dfe30BBbnduwA9zDpDmcWSHj3FkiatHnBzySt9JixeYNXIfrPMMzkGMwLTPjx-uoRW3jzBrBOWONOt9ARFwFw60OCIYV4gHac7hIc_tR99JRjF7fk_uHm7uL8npiiLCYiXFs425ZOyhIqQRkwWzGpJa9o7SrauKoVlJvaWckobaVo6kLIkuc4s6Lh-4hu7poYUorg1Bh9r-OHYlTNVtWsUM0K1cZqjhxvIj6Mah1e45AfVOu-V7xQUlFZZbVqtC6TJ3-Q_x7-BnySh4E</recordid><startdate>20220801</startdate><enddate>20220801</enddate><creator>Reddy, Nelaturi Nagendra</creator><creator>Panda, Deepak Kumar</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0001-8835-3908</orcidid></search><sort><creationdate>20220801</creationdate><title>Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor</title><author>Reddy, Nelaturi Nagendra ; Panda, Deepak Kumar</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c242t-7fb2fdb4f884e5701e1d518a83506f509f5b703c6fd8100b879627843c241d793</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>biosensor</topic><topic>gate-oxide-stack (GOS)</topic><topic>gate-work function engineering</topic><topic>label-free detection</topic><topic>triple metal gate</topic><topic>tunnel FET (TFET)</topic><topic>Z-shaped gate</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Reddy, Nelaturi Nagendra</creatorcontrib><creatorcontrib>Panda, Deepak Kumar</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of micromechanics and microengineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Reddy, Nelaturi Nagendra</au><au>Panda, Deepak Kumar</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor</atitle><jtitle>Journal of micromechanics and microengineering</jtitle><stitle>JMM</stitle><addtitle>J. Micromech. Microeng</addtitle><date>2022-08-01</date><risdate>2022</risdate><volume>32</volume><issue>8</issue><spage>85001</spage><pages>85001-</pages><issn>0960-1317</issn><eissn>1361-6439</eissn><coden>JMMIEZ</coden><abstract>In this article, a dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal source pocket tunnel field-effect transistor (DM-TMGOS-ZHP-TFET) structure has been investigated for the application of label free-biosensor. This work explores the advantage of gate work function engineering along with the gate-oxide-stack approach for the ZHP-TFET for the first time. An asymmetric nano-cavity is created adjacent to the source-channel junction to immobilize the target biomolecules conjugation to the proposed device. The sensitivity of the device is thoroughly investigated in terms of average subthreshold swing (SS), threshold voltage ( V th ) and the switching ratio ( I on / I off ) of the proposed device with the variation of the dielectric constant value inside the nano-gap under the gate electrode. The device characteristics are investigated with different combinations of metal work functions to match the desired feature and sensitivity of the device. In addition, the sensitivity analysis of the proposed device is analyzed in the presence of both positive and negative charged biomolecules in the cavity region to study the charge effect on label-free detection of the device. A comparative study is conducted between a single metal gate (SMG) ZHP-DM-TFET biosensor with the DM-TMGOS-ZHP-TFET biosensor explores the advantage of gate-work function engineering with a gate-oxide-stack approach. Interestingly the DM-TMGOS-ZHP-TFET biosensor shows superior results with a high current ratio sensitivity of 10 3 which is ten times more than the SMG-ZHP-DM-TFET biosensor and this device also exhibits low subthreshold characteristics.</abstract><pub>IOP Publishing</pub><doi>10.1088/1361-6439/ac7773</doi><tpages>12</tpages><orcidid>https://orcid.org/0000-0001-8835-3908</orcidid></addata></record>
fulltext fulltext
identifier ISSN: 0960-1317
ispartof Journal of micromechanics and microengineering, 2022-08, Vol.32 (8), p.85001
issn 0960-1317
1361-6439
language eng
recordid cdi_crossref_primary_10_1088_1361_6439_ac7773
source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects biosensor
gate-oxide-stack (GOS)
gate-work function engineering
label-free detection
triple metal gate
tunnel FET (TFET)
Z-shaped gate
title Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-08T17%3A22%3A23IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-iop_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Design%20and%20investigation%20of%20dielectric%20modulated%20triple%20metal%20gate-oxide-stack%20Z-shaped%20gate%20horizontal%20pocket%20TFET%20device%20as%20a%20label-free%20biosensor&rft.jtitle=Journal%20of%20micromechanics%20and%20microengineering&rft.au=Reddy,%20Nelaturi%20Nagendra&rft.date=2022-08-01&rft.volume=32&rft.issue=8&rft.spage=85001&rft.pages=85001-&rft.issn=0960-1317&rft.eissn=1361-6439&rft.coden=JMMIEZ&rft_id=info:doi/10.1088/1361-6439/ac7773&rft_dat=%3Ciop_cross%3Ejmmac7773%3C/iop_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true