Fabrication and calibration of nanostructured vanadium-doped ZnO-based micromachined sensor with superior sensitive for underwater acoustic measurement

A high-performance micromachined piezoelectric sensor based nanostructured vanadium-doped zinc oxide (ZnO) film with air-backing has been developed and characterized for underwater acoustic application. The sensing cell with a low foot-print of 2.0 mm × 2.0 mm is fabricated by Micro electro mechanic...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2022-01, Vol.32 (1), p.15005
Hauptverfasser:	Gao, Wei, Zhang, Yu, Ma, Binghe, Luo, Jian, Deng, Jinjun
Format:	Artikel
Sprache:	eng
Schlagworte:	acoustic measurement doped zinc oxide high sensitivity micromachined sensor
Online-Zugang:	Volltext
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