Development of an impedance-based interdigitated biochemical sensor using a multiuser silicon process

An impedance-based interdigitated biochemical sensor is presented in this work that is designed and fabricated using a standard polycrystalline silicon process. The sensor provides a near real-time, non-invasive, label free and rapid detection technique to quantify chemicals and biomarkers in aqueou...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2019-07, Vol.29 (7), p.75011
Hauptverfasser:	Mazrouei, R, Huffman, B, Sumita, M, Shavezipur, M
Format:	Artikel
Sprache:	eng
Schlagworte:	diethylhexyl phthalate (DEHP) double-layer capacitance electrochemical impedance spectroscopy equivalent circuit interdigitated sensor MEMS biochemical sensors
Online-Zugang:	Volltext
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