Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode

The potential of a special class of eigenmodes of microcantilevers, the so-called roof tile-shaped modes, is investigated for resonant mass sensing. Due to the 2D shape of vibration, the mass responsivity (resonance frequency shift per unit mass change) of these modes depends on the position along t...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2019-04, Vol.29 (4), p.45009
Hauptverfasser:	Patocka, F, Schneider, M, Dörr, N, Schneidhofer, C, Schmid, U
Format:	Artikel
Sprache:	eng
Schlagworte:	mass responsivity mass sensor MEMS microcantilever resonance frequency
Online-Zugang:	Volltext
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