Amorphous silicon nitride deposited by an NH 3 -free plasma enhanced chemical vapor deposition method for the coatings of the next generation laser interferometer gravitational waves detector

Cryogenic mechanical loss of the mirror coatings will result in thermal noise and limit the sensitivity of the next generation laser interferometer gravitational wave detectors operated at cryogenics. Amorphous silicon nitride (aSiN) films deposited by NH 3 plasma enhanced chemical vapor deposition...

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Veröffentlicht in:	Classical and quantum gravity 2022-08, Vol.39 (15), p.15
Hauptverfasser:	Tsai, Dung-Sheng, Huang, Zhen-Li, Chang, Wei-Chih, Chao, Shiuh
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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