Sputtering of graphite-like BN crystals

The sputtering of hexagonal and rhombohedral forms of boron nitride is studied by computer simulation and experimentally. The sputtering yield of the rhombohedral crystal is found to be up to twice as large as that of the hexagonal one in the energy range of Ar + ion bombardment from 0.3 to 4 keV. F...

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Veröffentlicht in:	Radiation effects and defects in solids 1995-05, Vol.133 (2), p.107-120
Hauptverfasser:	Eltekov, V. A., Elovikov, S. S., Colligon, J. S., Negrebetskaya, N. N., Promokhov, A. A., Yurasova, V. E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer Simulation ions Molecular Dynamics Sputtering
Online-Zugang:	Volltext
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