Near-field Soft X-ray Diffraction Modelled by the Multislice Method

Diffraction effects may limit the spatial resolution and fidelity of soft X-ray lithography and contact microradiography, by scattering during transmission of X rays through a finite-thickness object, and in subsequent propagation to the image-recording plane. A numerical method is described to mode...

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Veröffentlicht in:	Journal of modern optics 1994-01, Vol.41 (1), p.31-48
Hauptverfasser:	Hare, A.R., Morrison, G.R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Microelectronic fabrication (materials and surfaces technology) Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Structure of solids and liquids crystallography X- and γ-ray instruments and techniques X-ray diffraction and scattering
Online-Zugang:	Volltext
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