Process optimization and characterization of device worthy sol-gel based PZT for ferroelectric memories

The purpose of this work is to develop and characterize an optimized sol-gel PZT process to be used in ferroelectric memories. A review of the sol-gel process is given, including discussions on hydrolysis under acidic and basic conditions. Application of the sol-gel process to thin films is then dis...

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Veröffentlicht in:	Ferroelectrics 1990-12, Vol.112 (1), p.329-351
Hauptverfasser:	Melnick, B. M., Cuchiaro, J. D., Mcmillian, L. D., de Araujo, C. A. Paz, Scott, J. F.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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