Reconstructing surface profiles from curvature measurements

Recently, the measurement of curvature has been suggested as a promising new technique for the highly accurate determination of large-area surface profiles on the nanometer scale. It was shown that the curvature can be measured with highest accuracy and high lateral resolution. However, the reconstr...

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Veröffentlicht in:	Optik (Stuttgart) 2002, Vol.113 (4), p.154-158
Hauptverfasser:	Elster, Clemens, Gerhardt, Joachim, Thomsen-Schmidt, Peter, Schulz, Michael, Weingärtner, Ingolf
Format:	Artikel
Sprache:	eng
Schlagworte:	aspheres curvature Exact sciences and technology Fundamental areas of phenomenology (including applications) Optical testing techniques Optics ordinary differential equation Physics Runge-Kutta method Topography
Online-Zugang:	Volltext
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