$Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation$

Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation

We propose a method for measuring simultaneously the refractive index , extinction coefficient and thickness of thin films. The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The...

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Veröffentlicht in:	Quantum electronics (Woodbury, N.Y.) N.Y.), 2013-01, Vol.43 (12), p.1149-1153
Hauptverfasser:	Sokolov, V.I., Marusin, N.V., Panchenko, V.Ya, Savelyev, A.G., Seminogov, V.N., Khaydukov, E.V.
Format:	Artikel
Sprache:	eng
Schlagworte:	CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS Coefficients EXCITATION Extinction Hafnium INCIDENCE ANGLE LASERS method of excitation of waveguide modes OPTICS POLARIZATION REFLECTION REFRACTIVE INDEX Refractivity THICKNESS THIN FILMS WAVEGUIDES
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