Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation
We propose a method for measuring simultaneously the refractive index , extinction coefficient and thickness of thin films. The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The...
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| Veröffentlicht in: | Quantum electronics (Woodbury, N.Y.) N.Y.), 2013-01, Vol.43 (12), p.1149-1153 |
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| container_end_page | 1153 |
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| container_issue | 12 |
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| container_title | Quantum electronics (Woodbury, N.Y.) |
| container_volume | 43 |
| creator | Sokolov, V.I. Marusin, N.V. Panchenko, V.Ya Savelyev, A.G. Seminogov, V.N. Khaydukov, E.V. |
| description | We propose a method for measuring simultaneously the refractive index , extinction coefficient and thickness of thin films. The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The values of , and are found by minimising the functional , where and are the experimental and theoretical coefficients of reflection of the light beam from the interface between the measuring prism and the film at an angle of incidence . The errors in determining and by this method are and , respectively. |
| doi_str_mv | 10.1070/QE2013v043n12ABEH015272 |
| format | Article |
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The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The values of , and are found by minimising the functional , where and are the experimental and theoretical coefficients of reflection of the light beam from the interface between the measuring prism and the film at an angle of incidence . The errors in determining and by this method are and , respectively.</description><identifier>ISSN: 1063-7818</identifier><identifier>EISSN: 1468-4799</identifier><identifier>DOI: 10.1070/QE2013v043n12ABEH015272</identifier><language>eng</language><publisher>United States: Turpion Ltd and the Russian Academy of Sciences</publisher><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ; Coefficients ; EXCITATION ; Extinction ; Hafnium ; INCIDENCE ANGLE ; LASERS ; method of excitation of waveguide modes ; OPTICS ; POLARIZATION ; REFLECTION ; REFRACTIVE INDEX ; Refractivity ; THICKNESS ; THIN FILMS ; WAVEGUIDES</subject><ispartof>Quantum electronics (Woodbury, N.Y.), 2013-01, Vol.43 (12), p.1149-1153</ispartof><rights>2013 Kvantovaya Elektronika and Turpion Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c362t-5d66b27b5efb2d9dd2ee5a68b2e6847572e684600739f671371743b5e1656e4d3</citedby><cites>FETCH-LOGICAL-c362t-5d66b27b5efb2d9dd2ee5a68b2e6847572e684600739f671371743b5e1656e4d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1070/QE2013v043n12ABEH015272/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>230,314,780,784,885,27923,27924,53845,53892</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/22373654$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Sokolov, V.I.</creatorcontrib><creatorcontrib>Marusin, N.V.</creatorcontrib><creatorcontrib>Panchenko, V.Ya</creatorcontrib><creatorcontrib>Savelyev, A.G.</creatorcontrib><creatorcontrib>Seminogov, V.N.</creatorcontrib><creatorcontrib>Khaydukov, E.V.</creatorcontrib><title>Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation</title><title>Quantum electronics (Woodbury, N.Y.)</title><addtitle>QEL</addtitle><addtitle>Quantum Electron</addtitle><description>We propose a method for measuring simultaneously the refractive index , extinction coefficient and thickness of thin films. The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The values of , and are found by minimising the functional , where and are the experimental and theoretical coefficients of reflection of the light beam from the interface between the measuring prism and the film at an angle of incidence . The errors in determining and by this method are and , respectively.</description><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><subject>Coefficients</subject><subject>EXCITATION</subject><subject>Extinction</subject><subject>Hafnium</subject><subject>INCIDENCE ANGLE</subject><subject>LASERS</subject><subject>method of excitation of waveguide modes</subject><subject>OPTICS</subject><subject>POLARIZATION</subject><subject>REFLECTION</subject><subject>REFRACTIVE INDEX</subject><subject>Refractivity</subject><subject>THICKNESS</subject><subject>THIN FILMS</subject><subject>WAVEGUIDES</subject><issn>1063-7818</issn><issn>1468-4799</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqFkUtLAzEQxxdRsGg_gwEvHlzNO9tjrfUBggh6DrvJrI12k7pJa7350U1bryKBeWR-_xmSKYoTgi8IVvjyaUoxYSvMmSd0fDW9w0RQRfeKAeGyKrkajfZzjCUrVUWqw2IYo2uw4ByLSlaD4vsaEvSd83VywaPQoh7avjbJrQA5b2F9jmCdnDfbugnQts448AnV3qI0c-bdQ4wbZU48at28i6j5yhmgDtIs2E3ts17B69LZfBeygbVxaTvyuDho63mE4a8_Kl5ups-Tu_Lh8fZ-Mn4oDZM0lcJK2VDVCGgbakfWUgBRy6qhICuuhNp6ibFio1YqwhRRnGWcSCGBW3ZUnO76hpicjnk8mJkJ3oNJmlKmmBQ8U2c7atGHjyXEpDsXDczntYewjJoowfKp8AZVO9T0Icb8a3rRu67uvzTBerMc_cdyspLtlC4s9FtY9j4__F_VD9Ayk1g</recordid><startdate>20130101</startdate><enddate>20130101</enddate><creator>Sokolov, V.I.</creator><creator>Marusin, N.V.</creator><creator>Panchenko, V.Ya</creator><creator>Savelyev, A.G.</creator><creator>Seminogov, V.N.</creator><creator>Khaydukov, E.V.</creator><general>Turpion Ltd and the Russian Academy of Sciences</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>OTOTI</scope></search><sort><creationdate>20130101</creationdate><title>Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation</title><author>Sokolov, V.I. ; Marusin, N.V. ; Panchenko, V.Ya ; Savelyev, A.G. ; Seminogov, V.N. ; Khaydukov, E.V.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c362t-5d66b27b5efb2d9dd2ee5a68b2e6847572e684600739f671371743b5e1656e4d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</topic><topic>Coefficients</topic><topic>EXCITATION</topic><topic>Extinction</topic><topic>Hafnium</topic><topic>INCIDENCE ANGLE</topic><topic>LASERS</topic><topic>method of excitation of waveguide modes</topic><topic>OPTICS</topic><topic>POLARIZATION</topic><topic>REFLECTION</topic><topic>REFRACTIVE INDEX</topic><topic>Refractivity</topic><topic>THICKNESS</topic><topic>THIN FILMS</topic><topic>WAVEGUIDES</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Sokolov, V.I.</creatorcontrib><creatorcontrib>Marusin, N.V.</creatorcontrib><creatorcontrib>Panchenko, V.Ya</creatorcontrib><creatorcontrib>Savelyev, A.G.</creatorcontrib><creatorcontrib>Seminogov, V.N.</creatorcontrib><creatorcontrib>Khaydukov, E.V.</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>OSTI.GOV</collection><jtitle>Quantum electronics (Woodbury, N.Y.)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Sokolov, V.I.</au><au>Marusin, N.V.</au><au>Panchenko, V.Ya</au><au>Savelyev, A.G.</au><au>Seminogov, V.N.</au><au>Khaydukov, E.V.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation</atitle><jtitle>Quantum electronics (Woodbury, N.Y.)</jtitle><stitle>QEL</stitle><addtitle>Quantum Electron</addtitle><date>2013-01-01</date><risdate>2013</risdate><volume>43</volume><issue>12</issue><spage>1149</spage><epage>1153</epage><pages>1149-1153</pages><issn>1063-7818</issn><eissn>1468-4799</eissn><abstract>We propose a method for measuring simultaneously the refractive index , extinction coefficient and thickness of thin films. The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The values of , and are found by minimising the functional , where and are the experimental and theoretical coefficients of reflection of the light beam from the interface between the measuring prism and the film at an angle of incidence . The errors in determining and by this method are and , respectively.</abstract><cop>United States</cop><pub>Turpion Ltd and the Russian Academy of Sciences</pub><doi>10.1070/QE2013v043n12ABEH015272</doi><tpages>5</tpages></addata></record> |
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| identifier | ISSN: 1063-7818 |
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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS Coefficients EXCITATION Extinction Hafnium INCIDENCE ANGLE LASERS method of excitation of waveguide modes OPTICS POLARIZATION REFLECTION REFRACTIVE INDEX Refractivity THICKNESS THIN FILMS WAVEGUIDES |
| title | Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation |
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