High-quality temperature-complementary bulk acoustic wave resonators fabricated with strippable single-crystalline AlN films grown on sapphire

To satisfy the strict demands of 5G radio frequency communication, we propose high-quality, flexible temperature-compensated single-crystalline AlN film bulk acoustic wave resonators (TC-SABARs) based on a 6-inch sapphire substrate. An AlGaN sacrificial layer and a 600-nm-thick single-crystalline Al...

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Veröffentlicht in:	Applied physics letters 2024-11, Vol.125 (21)
Hauptverfasser:	Luo, Tianyou, Zhang, Yinuo, Chen, Zhipeng, Xu, Kaibin, Ouyang, Peidong, Hu, Han, Li, Chenyang, Zhu, Yuhan, Yi, Xinyan, Li, Guoqiang
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic waves Aluminum gallium nitrides Metalorganic chemical vapor deposition Organic chemistry Resonators Sapphire Silicon dioxide Single crystals Substrates
Online-Zugang:	Volltext
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