Insights into oxygen vacancy dynamics in HfO2–ZrO2 superlattice ferroelectric films: Implications for device reliability

Compared with solid solution (SS) Hf0.5Zr0.5O2, HfO2–ZrO2 superlattice (SL) ferroelectric films exhibit enhanced endurance and reduced leakage. However, so far, the underlying physical mechanism is still missing. In this work, first-principle calculations reveal that the superior reliability arises...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of applied physics 2024-10, Vol.136 (14)
Hauptverfasser:	Wu, Maokun, Cui, Boyao, Wang, Xuepei, Yuan, Miaojia, Wu, Yishan, Wen, Yichen, Liu, Jinhao, Zhang, Ting, Ren, Pengpeng, Ye, Sheng, Wang, Runsheng, Ji, Zhigang, Huang, Ru
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Ferroelectric materials Ferroelectricity First principles Free energy Hafnium oxide Heat of formation Oxygen Solid solutions Structural reliability Superlattices Zirconium dioxide
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!