Quantitative piezoelectric measurements of partially released Pb(Zr, Ti)O3 structures

The effective large signal longitudinal piezoelectric coefficient ( d 33 , f ∗ ) of piezoelectric thin films on rigid substrates has been widely investigated. Unclamped piezoelectric thin films are predicted to have a higher d 33 , f ∗ coefficient due to reduced constraints on piezoelectric strain,...

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Veröffentlicht in:	Journal of applied physics 2024-09, Vol.136 (9)
Hauptverfasser:	Tipsawat, Pannawit, Zheng, Xiaojun, Tran, Quyen T., Jackson, Thomas N., Trolier-McKinstry, Susan
Format:	Artikel
Sprache:	eng
Schlagworte:	Clamping Constraints Diaphragms Domain walls Etching Laser interferometry Lead zirconate titanates Piezoelectricity Reactive ion etching Substrates Thickness Thin films Zinc oxide Zirconium
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