A resonant magnetic microsensor based on magnetic torque with piezoresistive readout

Magnetic sensors with high sensitivity are critical for various technological applications. This paper presents a highly sensitive magnetic sensor based on magnetic torque. The sensor comprises a silicon cantilever with a micro-pillared soft magnet at its end. A piezoresistive strain sensing element...

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Veröffentlicht in:	Applied physics letters 2024-06, Vol.124 (25)
Hauptverfasser:	Zhao, Zhijian, Toda, Masaya, Ono, Takahito
Format:	Artikel
Sprache:	eng
Schlagworte:	Electrons Magnetic fields Resonant frequencies Sensitivity Sensors Silicon Spring constant Torque
Online-Zugang:	Volltext
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