Metasurface-enhanced Newton's rings interferometer-enabled local curvature detection

Curvature detection can reveal significant characteristics of target areas, playing a pivotal role in micro–nano fabrication. The Newton's rings experiment is one of the classical methods for detecting curvature; however, it has several limitations. First, stress-induced deformation damages the...

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Veröffentlicht in:	Applied physics letters 2023-12, Vol.123 (24)
Hauptverfasser:	Li, Qiuying, Yang, Qiang, Liu, Jiawei, Liu, Shuoqing, Shou, Yichang, Yang, Hua, Luo, Hailu
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Curvature Damage Interferometers Lenses Metasurfaces
Online-Zugang:	Volltext
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