Theoretical upper limits of the thermal conductivity of Si3N4

Silicon nitride (Si3N4) is a promising substrate for high-power electronics due to its superior mechanical properties and potential outstanding thermal conductivity (κ). As experiments keep pushing the upper limit of κ of Si3N4, it is believed that it can reach 450 W/mK, similar to SiC, based on cla...

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Veröffentlicht in:Applied physics letters 2023-05, Vol.122 (18)
Hauptverfasser: Zhou, Hao, Feng, Tianli
Format: Artikel
Sprache:eng
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