Physico-chemical elucidation of the mechanism involved in optical lithography: Micro-fabrication of 2D and 3D platforms
Direct laser lithography has attracted much attention as a convenient micro-fabrication method to develop rapid, free-form, and low-cost microstructures. In this work, different microdevices were fabricated using a home-made two-photon excitation microscope and a commercial negative UV photoresin. T...
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Veröffentlicht in: | Journal of applied physics 2022-11, Vol.132 (18) |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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