Physico-chemical elucidation of the mechanism involved in optical lithography: Micro-fabrication of 2D and 3D platforms

Direct laser lithography has attracted much attention as a convenient micro-fabrication method to develop rapid, free-form, and low-cost microstructures. In this work, different microdevices were fabricated using a home-made two-photon excitation microscope and a commercial negative UV photoresin. T...

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Veröffentlicht in:Journal of applied physics 2022-11, Vol.132 (18)
Hauptverfasser: Philipp, N., Angriman, S., Burne, S., Caral, P., Gómez Florenciano, I., Rapagnani, N., Gabriel, M., Estrada, L. C.
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Sprache:eng
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