Multi-functional resonant micro-sensor for simultaneous magnetic, CO2, and CH4 detection

We present a highly sensitive multi-parameter sensor for magnetic and gas detection. The device is based on an in-plane doubly clamped micro-beam micro-resonator, which is electrothermally heated. It acts as a Lorentz force magnetic sensor of high sensitivity, good linearity, good repeatability, and...

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Veröffentlicht in:	Journal of applied physics 2022-10, Vol.132 (14)
Hauptverfasser:	Zhao, Wen, Alcheikh, Nouha, Mbarek, Sofiane Ben, Younis, Mohammad I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Axial loads Carbon dioxide Frequency shift High temperature effects Linearity Lorentz force Magnetometers Methane Microbeams Parameter sensitivity Resonators Sensitivity Sensors
Online-Zugang:	Volltext
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