Kinetic simulation of the ideal multipole resonance probe

Active plasma resonance spectroscopy (APRS) is a process-compatible plasma diagnostic method, which utilizes the natural ability of plasmas to resonate on or near the electron plasma frequency. The multipole resonance probe (MRP) is a particular design of APRS that has a high degree of geometric and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of applied physics 2022-08, Vol.132 (6)
Hauptverfasser:	Gong, Junbo, Friedrichs, Michael, Oberrath, Jens, Brinkmann, Ralf Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Damping Dynamic models Electric fields Electron energy Electron plasma Material requirements planning Multipoles Plasma Plasma frequencies Plasma resonance Resonance probes
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!