On the Ohmic-dominant heating mode of capacitively coupled plasma inverted by boundary electron emission

Electron emission from the boundary is ubiquitous in a capacitively coupled plasma (CCP) and precipitates nonnegligible influence on the discharge properties. Here, we present Particle-in-Cell/Monte Carlo Collision simulation of an Ohmic-dominant heating mode of the capacitively coupled plasma, wher...

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Veröffentlicht in:	Applied physics letters 2022-07, Vol.121 (1)
Hauptverfasser:	Zhang, Shu, Sun, Guang-Yu, Chen, Jian, Sun, Hao-Min, Sun, An-Bang, Zhang, Guan-Jun
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY Applied physics Coupled modes Coupling (molecular) Discharge Electron emission Electrons Emission analysis Particle in cell technique Plasma diagnostics Plasma heating Precipitates Sheaths
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