Spectroscopic depth profilometry of organic thin films upon inductively coupled plasma etching

During the deposition and post-treatments of organic films, phase separation along the film-depth direction is a commonly observed phenomenon. Thus, film-depth profilometry of organic thin films and the corresponding scientific instruments are attracting extensive interest. Here, we propose spectros...

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Veröffentlicht in:	Review of scientific instruments 2022-07, Vol.93 (7), p.073903-073903
Hauptverfasser:	Xing, Yifan, Qiao, Nan, Yu, Jinde, Zhang, Meng, Dai, Junpeng, Niu, Tingting, Wang, Yuheng, Zhu, Yuanwei, Bu, Laju, Lu, Guanghao
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption spectra Electromagnetic absorption Field effect transistors Glow discharges Inductively coupled plasma Organic semiconductors Phase separation Photovoltaic cells Plasma etching Scientific apparatus & instruments Semiconductor devices Solar cells Spectroscopy Thin films
Online-Zugang:	Volltext
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