Achieving high spatial resolution in a large field-of-view using lensless x-ray imaging

X-ray ptychography, a powerful scanning lensless imaging technique, has become attractive for nondestructively imaging internal structures at nanoscale. Stage positioning overhead in conventional step-scan ptychography is one of the limiting factors on the imaging throughput. In this work, we demons...

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Veröffentlicht in:Applied physics letters 2021-09, Vol.119 (12)
Hauptverfasser: Jiang, Yi, Deng, Junjing, Yao, Yudong, Klug, Jeffrey A., Mashrafi, Sheikh, Roehrig, Christian, Preissner, Curt, Marin, Fabricio S., Cai, Zhonghou, Lai, Barry, Vogt, Stefan
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container_issue 12
container_start_page
container_title Applied physics letters
container_volume 119
creator Jiang, Yi
Deng, Junjing
Yao, Yudong
Klug, Jeffrey A.
Mashrafi, Sheikh
Roehrig, Christian
Preissner, Curt
Marin, Fabricio S.
Cai, Zhonghou
Lai, Barry
Vogt, Stefan
description X-ray ptychography, a powerful scanning lensless imaging technique, has become attractive for nondestructively imaging internal structures at nanoscale. Stage positioning overhead in conventional step-scan ptychography is one of the limiting factors on the imaging throughput. In this work, we demonstrate the use of advanced fly scan ptychography to achieve high-resolution ptychograms of modern integrated circuits on a large field-of-view at millimeter scale. By completely removing stage overheads between scan points, the imaging time for millimeter-size sample can be significantly reduced. Furthermore, we implement the orthogonal probe relaxation technique to overcome the variation of illumination across the large scan area as well as local vibrations. The capability of x-ray ptychography shown here is broadly applicable for various studies, which requires both high spatial resolution and large scan area.
doi_str_mv 10.1063/5.0067197
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subjects Applied physics
Field of view
High resolution
Imaging techniques
Integrated circuits
OTHER INSTRUMENTATION
Spatial resolution
X ray imagery
title Achieving high spatial resolution in a large field-of-view using lensless x-ray imaging
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