Achieving high spatial resolution in a large field-of-view using lensless x-ray imaging
X-ray ptychography, a powerful scanning lensless imaging technique, has become attractive for nondestructively imaging internal structures at nanoscale. Stage positioning overhead in conventional step-scan ptychography is one of the limiting factors on the imaging throughput. In this work, we demons...
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Veröffentlicht in: | Applied physics letters 2021-09, Vol.119 (12) |
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creator | Jiang, Yi Deng, Junjing Yao, Yudong Klug, Jeffrey A. Mashrafi, Sheikh Roehrig, Christian Preissner, Curt Marin, Fabricio S. Cai, Zhonghou Lai, Barry Vogt, Stefan |
description | X-ray ptychography, a powerful scanning lensless imaging technique, has become attractive for nondestructively imaging internal structures at nanoscale. Stage positioning overhead in conventional step-scan ptychography is one of the limiting factors on the imaging throughput. In this work, we demonstrate the use of advanced fly scan ptychography to achieve high-resolution ptychograms of modern integrated circuits on a large field-of-view at millimeter scale. By completely removing stage overheads between scan points, the imaging time for millimeter-size sample can be significantly reduced. Furthermore, we implement the orthogonal probe relaxation technique to overcome the variation of illumination across the large scan area as well as local vibrations. The capability of x-ray ptychography shown here is broadly applicable for various studies, which requires both high spatial resolution and large scan area. |
doi_str_mv | 10.1063/5.0067197 |
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(ANL), Argonne, IL (United States)</creatorcontrib><description>X-ray ptychography, a powerful scanning lensless imaging technique, has become attractive for nondestructively imaging internal structures at nanoscale. Stage positioning overhead in conventional step-scan ptychography is one of the limiting factors on the imaging throughput. In this work, we demonstrate the use of advanced fly scan ptychography to achieve high-resolution ptychograms of modern integrated circuits on a large field-of-view at millimeter scale. By completely removing stage overheads between scan points, the imaging time for millimeter-size sample can be significantly reduced. Furthermore, we implement the orthogonal probe relaxation technique to overcome the variation of illumination across the large scan area as well as local vibrations. 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(ANL), Argonne, IL (United States)</creatorcontrib><title>Achieving high spatial resolution in a large field-of-view using lensless x-ray imaging</title><title>Applied physics letters</title><description>X-ray ptychography, a powerful scanning lensless imaging technique, has become attractive for nondestructively imaging internal structures at nanoscale. Stage positioning overhead in conventional step-scan ptychography is one of the limiting factors on the imaging throughput. In this work, we demonstrate the use of advanced fly scan ptychography to achieve high-resolution ptychograms of modern integrated circuits on a large field-of-view at millimeter scale. By completely removing stage overheads between scan points, the imaging time for millimeter-size sample can be significantly reduced. Furthermore, we implement the orthogonal probe relaxation technique to overcome the variation of illumination across the large scan area as well as local vibrations. The capability of x-ray ptychography shown here is broadly applicable for various studies, which requires both high spatial resolution and large scan area.</description><subject>Applied physics</subject><subject>Field of view</subject><subject>High resolution</subject><subject>Imaging techniques</subject><subject>Integrated circuits</subject><subject>OTHER INSTRUMENTATION</subject><subject>Spatial resolution</subject><subject>X ray imagery</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNqd0M9PwyAUB3BiNHFOD_4HRE-adEJfgfa4LP5KlnhZ4pEghZallgrtdP-9bbbEuyfy4APv8UXompIFJRwe2IIQLmghTtCMEiESoDQ_RTNCCCS8YPQcXcS4HUuWAszQ-1LXzuxcW-HaVTWOneqdanAw0TdD73yLXYsVblSoDLbONGXibbJz5hsPcbrWmDY2Jkb8kwS1x-5TVeP2JTqzqonm6rjO0ebpcbN6SdZvz6-r5TrRkBd9YgnllgEpmShKEDTVVufjiRAfoFIDmSKgRMoU8JwrkqW8UCBMqUxmoQSYo5vDsz72TkbteqNr7dvW6F7SnDNSZCO6PaAu-K_BxF5u_RDacSyZMpHljAnGR3V3UDr4GIOxsgvjZ8JeUiKnbCWTx2xHe3-wU0c1pfQ_vPPhD8qutPAL3_aGWA</recordid><startdate>20210920</startdate><enddate>20210920</enddate><creator>Jiang, Yi</creator><creator>Deng, Junjing</creator><creator>Yao, Yudong</creator><creator>Klug, Jeffrey A.</creator><creator>Mashrafi, Sheikh</creator><creator>Roehrig, Christian</creator><creator>Preissner, Curt</creator><creator>Marin, Fabricio S.</creator><creator>Cai, Zhonghou</creator><creator>Lai, Barry</creator><creator>Vogt, Stefan</creator><general>American Institute of Physics</general><general>American Institute of Physics (AIP)</general><scope>AJDQP</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>OIOZB</scope><scope>OTOTI</scope><orcidid>https://orcid.org/0000-0003-4472-3385</orcidid><orcidid>https://orcid.org/0000-0002-1130-5569</orcidid><orcidid>https://orcid.org/0000-0002-2807-1324</orcidid><orcidid>https://orcid.org/0000000344723385</orcidid><orcidid>https://orcid.org/0000000228071324</orcidid><orcidid>https://orcid.org/0000000211305569</orcidid></search><sort><creationdate>20210920</creationdate><title>Achieving high spatial resolution in a large field-of-view using lensless x-ray imaging</title><author>Jiang, Yi ; Deng, Junjing ; Yao, Yudong ; Klug, Jeffrey A. ; Mashrafi, Sheikh ; Roehrig, Christian ; Preissner, Curt ; Marin, Fabricio S. ; Cai, Zhonghou ; Lai, Barry ; Vogt, Stefan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c389t-f016f530d579d3712cfc838977b3a2e34a03a725a3686a04269a37edae4f3d33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Applied physics</topic><topic>Field of view</topic><topic>High resolution</topic><topic>Imaging techniques</topic><topic>Integrated circuits</topic><topic>OTHER INSTRUMENTATION</topic><topic>Spatial resolution</topic><topic>X ray imagery</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Jiang, Yi</creatorcontrib><creatorcontrib>Deng, Junjing</creatorcontrib><creatorcontrib>Yao, Yudong</creatorcontrib><creatorcontrib>Klug, Jeffrey A.</creatorcontrib><creatorcontrib>Mashrafi, Sheikh</creatorcontrib><creatorcontrib>Roehrig, Christian</creatorcontrib><creatorcontrib>Preissner, Curt</creatorcontrib><creatorcontrib>Marin, Fabricio S.</creatorcontrib><creatorcontrib>Cai, Zhonghou</creatorcontrib><creatorcontrib>Lai, Barry</creatorcontrib><creatorcontrib>Vogt, Stefan</creatorcontrib><creatorcontrib>Argonne National Lab. 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By completely removing stage overheads between scan points, the imaging time for millimeter-size sample can be significantly reduced. Furthermore, we implement the orthogonal probe relaxation technique to overcome the variation of illumination across the large scan area as well as local vibrations. The capability of x-ray ptychography shown here is broadly applicable for various studies, which requires both high spatial resolution and large scan area.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/5.0067197</doi><tpages>6</tpages><orcidid>https://orcid.org/0000-0003-4472-3385</orcidid><orcidid>https://orcid.org/0000-0002-1130-5569</orcidid><orcidid>https://orcid.org/0000-0002-2807-1324</orcidid><orcidid>https://orcid.org/0000000344723385</orcidid><orcidid>https://orcid.org/0000000228071324</orcidid><orcidid>https://orcid.org/0000000211305569</orcidid><oa>free_for_read</oa></addata></record> |
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subjects | Applied physics Field of view High resolution Imaging techniques Integrated circuits OTHER INSTRUMENTATION Spatial resolution X ray imagery |
title | Achieving high spatial resolution in a large field-of-view using lensless x-ray imaging |
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