Methods to achieve ultra-high quality factor silicon nitride resonators

On-chip resonators are promising candidates for applications in a wide range of integrated photonic fields, such as communications, spectroscopy, biosensing, and optical filters, due to their compact size, wavelength selectivity, tunability, and flexible structure. The high quality (Q) factor is a m...

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Veröffentlicht in:	APL photonics 2021-07, Vol.6 (7), p.071101-071101-13
Hauptverfasser:	Ji, Xingchen, Roberts, Samantha, Corato-Zanarella, Mateus, Lipson, Michal
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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