Two-dimensional simulation of an Ar/H2 direct-current discharge plasma

We created a two-dimensional, mathematical fluid model of a plasma in a spherical direct-current (DC) glow-discharge chamber based on the finite-element method (FEM) using the commercial FEM solver COMSOL Multiphysics. The model is based on the Boltzmann transport equation, and we solved it to simul...

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Veröffentlicht in:	AIP advances 2021-05, Vol.11 (5), p.055209-055209-9
Hauptverfasser:	Che, Yong, Zang, Qing, Han, Xiaofeng, Xiao, Shumei, Huang, Kai, Hu, Jiahui, Ren, Mengfang, Liu, Jianwen, Zhou, Jian
Format:	Artikel
Sprache:	eng
Schlagworte:	Boltzmann transport equation Chambers Electric potential Electron density Electron energy Electrons Finite element method Glow discharges Mathematical analysis Mathematical models Physical properties Simulation Spherical plasmas Transport equations Two dimensional models Voltage
Online-Zugang:	Volltext
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