Ultraminiature AlN diaphragm acoustic transducer

Piezoelectric acoustic transducers consisting of a circular aluminum nitride and silicon nitride unimorph diaphragm and an encapsulated air-filled back cavity are reported. Analytical and finite element analysis models are used to design the transducer to achieve low minimum detectable pressure (MDP...

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Veröffentlicht in:	Applied physics letters 2020-10, Vol.117 (14), p.143504-143504
Hauptverfasser:	Hake, Alison E., Zhao, Chuming, Ping, Lichuan, Grosh, Karl
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Applied physics Device Physics Finite element method Material properties Microelectromechanical systems Piezoelectricity Residual stress Silicon nitride Transducers
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