Nano-indentation mechanical characterizations of solution processed inorganic metal oxide thin films and influence of grain size
Aluminum-doped zinc oxide thin films were prepared by solution synthesis where molarity concentrations and mixing ratios for oxide and dopant sources were changed while deposition and pre- and post-deposition annealing steps remained the same. Post-deposition high-temperature annealing is known to i...
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Veröffentlicht in: | AIP advances 2020-10, Vol.10 (10), p.105016-105016-6 |
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creator | Ullah, Sana De Matteis, Fabio Lucci, Massimiliano Davoli, Ivan |
description | Aluminum-doped zinc oxide thin films were prepared by solution synthesis where molarity concentrations and mixing ratios for oxide and dopant sources were changed while deposition and pre- and post-deposition annealing steps remained the same. Post-deposition high-temperature annealing is known to improve conductivity and transparency but may deteriorate the mechanical characteristics of films. However, we report the successful preparation of thin films with high mechanical hardness (>11 MPa) and reduced modulus (>102 MPa) along with high electro-optical characteristics even after multiple annealing steps. Changes in grain sizes because of changes in molarity concentrations and difference of atomic radii caused mechanical characteristics of films. Both regular and inverse Hall–Petch relations were observed. |
doi_str_mv | 10.1063/5.0020213 |
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Post-deposition high-temperature annealing is known to improve conductivity and transparency but may deteriorate the mechanical characteristics of films. However, we report the successful preparation of thin films with high mechanical hardness (>11 MPa) and reduced modulus (>102 MPa) along with high electro-optical characteristics even after multiple annealing steps. Changes in grain sizes because of changes in molarity concentrations and difference of atomic radii caused mechanical characteristics of films. Both regular and inverse Hall–Petch relations were observed.</description><identifier>ISSN: 2158-3226</identifier><identifier>EISSN: 2158-3226</identifier><identifier>DOI: 10.1063/5.0020213</identifier><identifier>CODEN: AAIDBI</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Aluminum ; Annealing ; Atomic radius ; Deposition ; Grain size ; High temperature ; Mechanical properties ; Metal oxides ; Mixing ratio ; Nanoindentation ; Optical properties ; Thin films ; Zinc oxide</subject><ispartof>AIP advances, 2020-10, Vol.10 (10), p.105016-105016-6</ispartof><rights>Author(s)</rights><rights>2020 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c428t-ae01eeff811d5403300e562b4ae0daa58e328dd7946f7287d70e28d2771ebd2d3</citedby><cites>FETCH-LOGICAL-c428t-ae01eeff811d5403300e562b4ae0daa58e328dd7946f7287d70e28d2771ebd2d3</cites><orcidid>0000-0003-2110-9104 ; 0000-0002-0649-449X ; 0000-0003-2185-5094 ; 0000-0001-7860-9754</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,860,2096,27901,27902</link.rule.ids></links><search><creatorcontrib>Ullah, Sana</creatorcontrib><creatorcontrib>De Matteis, Fabio</creatorcontrib><creatorcontrib>Lucci, Massimiliano</creatorcontrib><creatorcontrib>Davoli, Ivan</creatorcontrib><title>Nano-indentation mechanical characterizations of solution processed inorganic metal oxide thin films and influence of grain size</title><title>AIP advances</title><description>Aluminum-doped zinc oxide thin films were prepared by solution synthesis where molarity concentrations and mixing ratios for oxide and dopant sources were changed while deposition and pre- and post-deposition annealing steps remained the same. Post-deposition high-temperature annealing is known to improve conductivity and transparency but may deteriorate the mechanical characteristics of films. However, we report the successful preparation of thin films with high mechanical hardness (>11 MPa) and reduced modulus (>102 MPa) along with high electro-optical characteristics even after multiple annealing steps. Changes in grain sizes because of changes in molarity concentrations and difference of atomic radii caused mechanical characteristics of films. Both regular and inverse Hall–Petch relations were observed.</description><subject>Aluminum</subject><subject>Annealing</subject><subject>Atomic radius</subject><subject>Deposition</subject><subject>Grain size</subject><subject>High temperature</subject><subject>Mechanical properties</subject><subject>Metal oxides</subject><subject>Mixing ratio</subject><subject>Nanoindentation</subject><subject>Optical properties</subject><subject>Thin films</subject><subject>Zinc oxide</subject><issn>2158-3226</issn><issn>2158-3226</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><sourceid>DOA</sourceid><recordid>eNqdkU1LxDAQhosoKOrBf1DwpNA1n216lMUvWPSi55AmE83STdakK-rJn252u6hnc8kw88w7ybxFcYLRBKOaXvAJQgQRTHeKA4K5qCgh9e6feL84TmmO8mEtRoIdFF_3yofKeQN-UIMLvlyAflHeadWXOYhKDxDd56aWymDLFPrVBlzGoCElMKXzIT6ve3LzkPvCuzNQDi_Ol9b1i1Qqv4ZsvwKvYS3yHFUuJvcJR8WeVX2C4-19WDxdXz1Ob6vZw83d9HJWaUbEUClAGMBagbHhDFGKEPCadCwXjFJcACXCmKZltW2IaEyDICdI02DoDDH0sLgbdU1Qc7mMbqHihwzKyU0if0CqODjdg4RGtEyrWoCAvKema4Vumehabk3XdThrnY5aeQWvK0iDnIdV9Pn5kjDWco5ITTN1NlI6hpQi2J-pGMm1X5LLrV-ZPR_ZpN3ow__gtxB_Qbk0ln4DHjulYw</recordid><startdate>20201001</startdate><enddate>20201001</enddate><creator>Ullah, Sana</creator><creator>De Matteis, Fabio</creator><creator>Lucci, Massimiliano</creator><creator>Davoli, Ivan</creator><general>American Institute of Physics</general><general>AIP Publishing LLC</general><scope>AJDQP</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>DOA</scope><orcidid>https://orcid.org/0000-0003-2110-9104</orcidid><orcidid>https://orcid.org/0000-0002-0649-449X</orcidid><orcidid>https://orcid.org/0000-0003-2185-5094</orcidid><orcidid>https://orcid.org/0000-0001-7860-9754</orcidid></search><sort><creationdate>20201001</creationdate><title>Nano-indentation mechanical characterizations of solution processed inorganic metal oxide thin films and influence of grain size</title><author>Ullah, Sana ; De Matteis, Fabio ; Lucci, Massimiliano ; Davoli, Ivan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c428t-ae01eeff811d5403300e562b4ae0daa58e328dd7946f7287d70e28d2771ebd2d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Aluminum</topic><topic>Annealing</topic><topic>Atomic radius</topic><topic>Deposition</topic><topic>Grain size</topic><topic>High temperature</topic><topic>Mechanical properties</topic><topic>Metal oxides</topic><topic>Mixing ratio</topic><topic>Nanoindentation</topic><topic>Optical properties</topic><topic>Thin films</topic><topic>Zinc oxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ullah, Sana</creatorcontrib><creatorcontrib>De Matteis, Fabio</creatorcontrib><creatorcontrib>Lucci, Massimiliano</creatorcontrib><creatorcontrib>Davoli, Ivan</creatorcontrib><collection>AIP Open Access Journals</collection><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>DOAJ Directory of Open Access Journals</collection><jtitle>AIP advances</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ullah, Sana</au><au>De Matteis, Fabio</au><au>Lucci, Massimiliano</au><au>Davoli, Ivan</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Nano-indentation mechanical characterizations of solution processed inorganic metal oxide thin films and influence of grain size</atitle><jtitle>AIP advances</jtitle><date>2020-10-01</date><risdate>2020</risdate><volume>10</volume><issue>10</issue><spage>105016</spage><epage>105016-6</epage><pages>105016-105016-6</pages><issn>2158-3226</issn><eissn>2158-3226</eissn><coden>AAIDBI</coden><abstract>Aluminum-doped zinc oxide thin films were prepared by solution synthesis where molarity concentrations and mixing ratios for oxide and dopant sources were changed while deposition and pre- and post-deposition annealing steps remained the same. Post-deposition high-temperature annealing is known to improve conductivity and transparency but may deteriorate the mechanical characteristics of films. However, we report the successful preparation of thin films with high mechanical hardness (>11 MPa) and reduced modulus (>102 MPa) along with high electro-optical characteristics even after multiple annealing steps. Changes in grain sizes because of changes in molarity concentrations and difference of atomic radii caused mechanical characteristics of films. Both regular and inverse Hall–Petch relations were observed.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/5.0020213</doi><tpages>6</tpages><orcidid>https://orcid.org/0000-0003-2110-9104</orcidid><orcidid>https://orcid.org/0000-0002-0649-449X</orcidid><orcidid>https://orcid.org/0000-0003-2185-5094</orcidid><orcidid>https://orcid.org/0000-0001-7860-9754</orcidid><oa>free_for_read</oa></addata></record> |
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subjects | Aluminum Annealing Atomic radius Deposition Grain size High temperature Mechanical properties Metal oxides Mixing ratio Nanoindentation Optical properties Thin films Zinc oxide |
title | Nano-indentation mechanical characterizations of solution processed inorganic metal oxide thin films and influence of grain size |
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