Evidence of a charge induced contribution to the sputtering yield of insulating and semiconducting materials

Following the recent observation in this laboratory of a charge induced damage effect in insulators under inert gas ion bombardment, the influence of the charge state of the beam (ion or atom) on the sputtering yield of insulating and semiconducting materials has been investigated. A series of sputt...

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Veröffentlicht in:	Appl. Phys. Lett.; (United States) 1986-07, Vol.49 (4), p.188-190
Hauptverfasser:	ECCLES, A. J, VAN DEN BERG, J. A, BROWN, A, VICKERMAN, J. C
Format:	Artikel
Sprache:	eng
Schlagworte:	ARGON ARGON IONS ARSENIC COMPOUNDS ARSENIDES ATOM COLLISIONS CHALCOGENIDES CHARGED PARTICLES CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS COLLISIONS Condensed matter: electronic structure, electrical, magnetic, and optical properties Electron and ion emission by liquids and solids impact phenomena ELEMENTS Exact sciences and technology FLUIDS GALLIUM ARSENIDES GALLIUM COMPOUNDS GASES GLASS GOLD Impact phenomena (including electron spectra and sputtering) ION COLLISIONS IONS METALS NONMETALS Other electron-impact emission phenomena OXIDES OXYGEN COMPOUNDS Physics PNICTIDES RARE GASES REFRACTORY METAL COMPOUNDS SEMIMETALS SILICON SPUTTERING TANTALUM COMPOUNDS TANTALUM OXIDES TRANSITION ELEMENT COMPOUNDS TRANSITION ELEMENTS 640301 > Atomic, Molecular & Chemical Physics-- Beams & their Reactions
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