Laser chemical vapor deposition of gold

High quality gold spots and lines have been deposited from gaseous dimethyl (2, 4-pentanedionato) gold (III) using a focused argon ion laser. Growth rates of 1 μm/s at power densities of 4×105 W/cm2 were obtained. Resistivity, threshold writing power densities, and deposition rates were measured and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Applied physics letters 1985-09, Vol.47 (5), p.538-540
Hauptverfasser:	Baum, Thomas H., Jones, Carol R.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!