Molecular beam epitaxial growth and material properties of GaAs and AlGaAs on Si (100)

We have grown GaAs and AlGaAs on (100) oriented Si substrates by molecular beam epitaxy. The epitaxial growth was studied in situ by reflection high-energy electron diffraction. Low-temperature photoluminescence, Raman scattering, and scanning electron microscopy were used to characterize the epitax...

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Veröffentlicht in:Applied physics letters 1984-06, Vol.44 (12), p.1149-1151
1. Verfasser: WANG, W. I
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container_title Applied physics letters
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creator WANG, W. I
description We have grown GaAs and AlGaAs on (100) oriented Si substrates by molecular beam epitaxy. The epitaxial growth was studied in situ by reflection high-energy electron diffraction. Low-temperature photoluminescence, Raman scattering, and scanning electron microscopy were used to characterize the epitaxial layers. It is shown for the first time that antiphase disorder could be suppressed. The doped AlGaAs grown directly on Si substrates exhibited PL efficiency similar to that of AlGaAs grown on GaAs substrates.
doi_str_mv 10.1063/1.94673
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I</creatorcontrib><title>Molecular beam epitaxial growth and material properties of GaAs and AlGaAs on Si (100)</title><title>Applied physics letters</title><description>We have grown GaAs and AlGaAs on (100) oriented Si substrates by molecular beam epitaxy. The epitaxial growth was studied in situ by reflection high-energy electron diffraction. Low-temperature photoluminescence, Raman scattering, and scanning electron microscopy were used to characterize the epitaxial layers. It is shown for the first time that antiphase disorder could be suppressed. 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subjects Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
title Molecular beam epitaxial growth and material properties of GaAs and AlGaAs on Si (100)
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