Molecular beam epitaxial growth and material properties of GaAs and AlGaAs on Si (100)
We have grown GaAs and AlGaAs on (100) oriented Si substrates by molecular beam epitaxy. The epitaxial growth was studied in situ by reflection high-energy electron diffraction. Low-temperature photoluminescence, Raman scattering, and scanning electron microscopy were used to characterize the epitax...
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Veröffentlicht in: | Applied physics letters 1984-06, Vol.44 (12), p.1149-1151 |
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description | We have grown GaAs and AlGaAs on (100) oriented Si substrates by molecular beam epitaxy. The epitaxial growth was studied in situ by reflection high-energy electron diffraction. Low-temperature photoluminescence, Raman scattering, and scanning electron microscopy were used to characterize the epitaxial layers. It is shown for the first time that antiphase disorder could be suppressed. The doped AlGaAs grown directly on Si substrates exhibited PL efficiency similar to that of AlGaAs grown on GaAs substrates. |
doi_str_mv | 10.1063/1.94673 |
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I</creator><creatorcontrib>WANG, W. I</creatorcontrib><description>We have grown GaAs and AlGaAs on (100) oriented Si substrates by molecular beam epitaxy. The epitaxial growth was studied in situ by reflection high-energy electron diffraction. Low-temperature photoluminescence, Raman scattering, and scanning electron microscopy were used to characterize the epitaxial layers. It is shown for the first time that antiphase disorder could be suppressed. The doped AlGaAs grown directly on Si substrates exhibited PL efficiency similar to that of AlGaAs grown on GaAs substrates.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.94673</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>Melville, NY: American Institute of Physics</publisher><subject>Condensed matter: structure, mechanical and thermal properties ; Exact sciences and technology ; Physics ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Thin film structure and morphology</subject><ispartof>Applied physics letters, 1984-06, Vol.44 (12), p.1149-1151</ispartof><rights>1985 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c318t-c9ab0549c44911f7838c0788fa84b4fa6c8912239a5384fd517d16216dea3a0b3</citedby><cites>FETCH-LOGICAL-c318t-c9ab0549c44911f7838c0788fa84b4fa6c8912239a5384fd517d16216dea3a0b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27923,27924</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=8994165$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>WANG, W. I</creatorcontrib><title>Molecular beam epitaxial growth and material properties of GaAs and AlGaAs on Si (100)</title><title>Applied physics letters</title><description>We have grown GaAs and AlGaAs on (100) oriented Si substrates by molecular beam epitaxy. The epitaxial growth was studied in situ by reflection high-energy electron diffraction. Low-temperature photoluminescence, Raman scattering, and scanning electron microscopy were used to characterize the epitaxial layers. It is shown for the first time that antiphase disorder could be suppressed. The doped AlGaAs grown directly on Si substrates exhibited PL efficiency similar to that of AlGaAs grown on GaAs substrates.</description><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Exact sciences and technology</subject><subject>Physics</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Thin film structure and morphology</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1984</creationdate><recordtype>article</recordtype><recordid>eNo9kMtOwzAQRS0EEqUgfsELJGCR4sk4jr2sqlKQiljw2EYTx4agvGQHAX9PH4jVzNx7NIvD2DmIGQiFNzAzUuV4wCYg8jxBAH3IJkIITJTJ4JidxPixObMUccJeH_rG2c-GAi8dtdwN9UjfNTX8LfRf4zunruItjS5ssyH0gwtj7SLvPV_RPO76ebNb-44_1fwKhLg-ZUeemujO_uaUvdwunxd3yfpxdb-YrxOLoMfEGipFJo2V0gD4XKO2Itfak5al9KSsNpCmaChDLX2VQV6BSkFVjpBEiVN2uf9rQx9jcL4YQt1S-ClAFFsdBRQ7HRvyYk8OFC01PlBn6_iPa2MkqAx_AYQuXBU</recordid><startdate>19840615</startdate><enddate>19840615</enddate><creator>WANG, W. I</creator><general>American Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19840615</creationdate><title>Molecular beam epitaxial growth and material properties of GaAs and AlGaAs on Si (100)</title><author>WANG, W. I</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c318t-c9ab0549c44911f7838c0788fa84b4fa6c8912239a5384fd517d16216dea3a0b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1984</creationdate><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Exact sciences and technology</topic><topic>Physics</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Thin film structure and morphology</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>WANG, W. I</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>WANG, W. I</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Molecular beam epitaxial growth and material properties of GaAs and AlGaAs on Si (100)</atitle><jtitle>Applied physics letters</jtitle><date>1984-06-15</date><risdate>1984</risdate><volume>44</volume><issue>12</issue><spage>1149</spage><epage>1151</epage><pages>1149-1151</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>We have grown GaAs and AlGaAs on (100) oriented Si substrates by molecular beam epitaxy. The epitaxial growth was studied in situ by reflection high-energy electron diffraction. Low-temperature photoluminescence, Raman scattering, and scanning electron microscopy were used to characterize the epitaxial layers. It is shown for the first time that antiphase disorder could be suppressed. The doped AlGaAs grown directly on Si substrates exhibited PL efficiency similar to that of AlGaAs grown on GaAs substrates.</abstract><cop>Melville, NY</cop><pub>American Institute of Physics</pub><doi>10.1063/1.94673</doi><tpages>3</tpages></addata></record> |
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issn | 0003-6951 1077-3118 |
language | eng |
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source | AIP Digital Archive |
subjects | Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology |
title | Molecular beam epitaxial growth and material properties of GaAs and AlGaAs on Si (100) |
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