Performance improvement of on-chip integrable terahertz microbolometer arrays using nanoscale meander titanium thermistor

In this study, uncooled antenna-coupled microbolometer arrays were fabricated to detect terahertz waves by using nanoscale meander-shaped Ti thermistors with design widths of DW = 0.1 and 0.2 μm, respectively, on SiO2 and SiNx substrates. Each unit device with a thermistor with DW = 0.1 μm yielded d...

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Veröffentlicht in:	Journal of applied physics 2019-06, Vol.125 (21)
Hauptverfasser:	Banerjee, Amit, Satoh, Hiroaki, Elamaran, Durgadevi, Sharma, Yash, Hiromoto, Norihisa, Inokawa, Hiroshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Antenna arrays Applied physics Devices Electrical resistivity Grain size Mathematical analysis Miniaturization Silicon dioxide Substrates Terahertz frequencies Thermistors Titanium
Online-Zugang:	Volltext
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