Review of inductively coupled plasmas: Nano-applications and bistable hysteresis physics

Many different gas discharges and plasmas exhibit bistable states under a given set of conditions, and the history-dependent hysteresis that is manifested by intensive quantities of the system upon variation of an external parameter has been observed in inductively coupled plasmas (ICPs). When the e...

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Veröffentlicht in:	Applied Physics Reviews 2018-03, Vol.5 (1)
1. Verfasser:	Lee, Hyo-Chang
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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