Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the mag...

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Veröffentlicht in:	Applied physics letters 2017-12, Vol.111 (23)
Hauptverfasser:	Buettel, G., Joppich, J., Hartmann, U.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Aspect ratio Compressive properties Coplanar waveguides Electromechanical devices Ferromagnetic resonance Ferromagnetism Ferrous alloys Finite element method Giant magnetoimpedance Magnetic alloys Magnetic fields Magnetoresistivity Magnetostriction Mechanical devices Micromachining Multilayers Network analysers Rangefinding Silicon Skin effect Strain gauges Tensile strain
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