The elastic microstructures of inkjet printed polydimethylsiloxane as the patterned dielectric layer for pressure sensors
A direct inkjet printing process was developed to fabricate patterned elastic microstructures for pressure sensors using n-butyl acetate diluted polymethylsiloxane (PDMS). The diluted PDMS precursor mixture with a cross-linker exhibited a controllable viscosity below 14 cP in 48 h at 25 °C, and the...
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Veröffentlicht in: | Applied physics letters 2017-06, Vol.110 (26) |
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creator | Peng, Yongyi Xiao, Shugang Yang, Junliang Lin, Jian Yuan, Wei Gu, Weibing Wu, Xinzhou Cui, Zheng |
description | A direct inkjet printing process was developed to fabricate patterned elastic microstructures for pressure sensors using n-butyl acetate diluted polymethylsiloxane (PDMS). The diluted PDMS precursor mixture with a cross-linker exhibited a controllable viscosity below 14 cP in 48 h at 25 °C, and the PDMS film had lower elastic modulus and hardness values than the non-diluted PDMS precursor after curing. The capacitor using the printed PDMS film as the microstructured dielectric layer showed a very high pressure sensitivity of up to 10.4 kPa−1 under the pressure below 70 Pa, and the pressure sensitivity would be dramatically decreased to 0.043–0.052 kPa−1 under the pressure between 2 and 8 kPa. Furthermore, the triboelectric sensors could be structured with an inkjet printed PDMS film and controllably generate the voltage signals up to 1.23 V without any amplification. The results suggest that mechanical properties and patterned elastic microstructures play the key roles in PDMS-based sensor devices, and the PDMS dielectric layer with controlled mechanical properties and microstructures fabricated via directly inkjet printing opens up the applications of the PDMS and its composites in functional devices. |
doi_str_mv | 10.1063/1.4990528 |
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The diluted PDMS precursor mixture with a cross-linker exhibited a controllable viscosity below 14 cP in 48 h at 25 °C, and the PDMS film had lower elastic modulus and hardness values than the non-diluted PDMS precursor after curing. The capacitor using the printed PDMS film as the microstructured dielectric layer showed a very high pressure sensitivity of up to 10.4 kPa−1 under the pressure below 70 Pa, and the pressure sensitivity would be dramatically decreased to 0.043–0.052 kPa−1 under the pressure between 2 and 8 kPa. Furthermore, the triboelectric sensors could be structured with an inkjet printed PDMS film and controllably generate the voltage signals up to 1.23 V without any amplification. The results suggest that mechanical properties and patterned elastic microstructures play the key roles in PDMS-based sensor devices, and the PDMS dielectric layer with controlled mechanical properties and microstructures fabricated via directly inkjet printing opens up the applications of the PDMS and its composites in functional devices.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.4990528</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Applied physics ; Crosslinking ; Dielectric properties ; Dilution ; Elastic properties ; Ink jet printers ; Inkjet printing ; Mechanical properties ; Modulus of elasticity ; Polydimethylsiloxane ; Precursors ; Pressure sensors ; Sensitivity ; Sensors ; Silicone resins ; Stability</subject><ispartof>Applied physics letters, 2017-06, Vol.110 (26)</ispartof><rights>Author(s)</rights><rights>2017 Author(s). Published by AIP Publishing.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c393t-75abc7c49c380b9ead13edfbcb14d4f62e6cc591974e1d27201f09dd6b8c0cb93</citedby><cites>FETCH-LOGICAL-c393t-75abc7c49c380b9ead13edfbcb14d4f62e6cc591974e1d27201f09dd6b8c0cb93</cites><orcidid>0000-0002-1174-4780</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/apl/article-lookup/doi/10.1063/1.4990528$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,780,784,794,4512,27924,27925,76384</link.rule.ids></links><search><creatorcontrib>Peng, Yongyi</creatorcontrib><creatorcontrib>Xiao, Shugang</creatorcontrib><creatorcontrib>Yang, Junliang</creatorcontrib><creatorcontrib>Lin, Jian</creatorcontrib><creatorcontrib>Yuan, Wei</creatorcontrib><creatorcontrib>Gu, Weibing</creatorcontrib><creatorcontrib>Wu, Xinzhou</creatorcontrib><creatorcontrib>Cui, Zheng</creatorcontrib><title>The elastic microstructures of inkjet printed polydimethylsiloxane as the patterned dielectric layer for pressure sensors</title><title>Applied physics letters</title><description>A direct inkjet printing process was developed to fabricate patterned elastic microstructures for pressure sensors using n-butyl acetate diluted polymethylsiloxane (PDMS). The diluted PDMS precursor mixture with a cross-linker exhibited a controllable viscosity below 14 cP in 48 h at 25 °C, and the PDMS film had lower elastic modulus and hardness values than the non-diluted PDMS precursor after curing. The capacitor using the printed PDMS film as the microstructured dielectric layer showed a very high pressure sensitivity of up to 10.4 kPa−1 under the pressure below 70 Pa, and the pressure sensitivity would be dramatically decreased to 0.043–0.052 kPa−1 under the pressure between 2 and 8 kPa. Furthermore, the triboelectric sensors could be structured with an inkjet printed PDMS film and controllably generate the voltage signals up to 1.23 V without any amplification. The results suggest that mechanical properties and patterned elastic microstructures play the key roles in PDMS-based sensor devices, and the PDMS dielectric layer with controlled mechanical properties and microstructures fabricated via directly inkjet printing opens up the applications of the PDMS and its composites in functional devices.</description><subject>Applied physics</subject><subject>Crosslinking</subject><subject>Dielectric properties</subject><subject>Dilution</subject><subject>Elastic properties</subject><subject>Ink jet printers</subject><subject>Inkjet printing</subject><subject>Mechanical properties</subject><subject>Modulus of elasticity</subject><subject>Polydimethylsiloxane</subject><subject>Precursors</subject><subject>Pressure sensors</subject><subject>Sensitivity</subject><subject>Sensors</subject><subject>Silicone resins</subject><subject>Stability</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNp90M1LwzAYx_EgCs7pwf8g4EmhmqfpW44yfIOBl3kuafKUZXZNTVKx_70ZG3oQPIXAh2_Ij5BLYLfACn4Ht5kQLE-rIzIDVpYJB6iOyYwxxpNC5HBKzrzfxGuecj4j02qNFDvpg1F0a5SzPrhRhdGhp7alpn_fYKCDM31ATQfbTdpsMaynzpvOfskeqfQ0xMogQ0DXR6UNdqiCi8lOTuhoa11MoPcxSz323jp_Tk5a2Xm8OJxz8vb4sFo8J8vXp5fF_TJRXPCQlLlsVKkyoXjFGoFSA0fdNqqBTGdtkWKhVC5AlBmCTsuUQcuE1kVTKaYawefkat8dnP0Y0Yd6Y0fXxyfrFKAAxss0j-p6r3YLeIdtHb-8lW6qgdW7ZWuoD8tGe7O3Xpkgg7H9D_607hfWg27_w3_L3-yxiwc</recordid><startdate>20170626</startdate><enddate>20170626</enddate><creator>Peng, Yongyi</creator><creator>Xiao, Shugang</creator><creator>Yang, Junliang</creator><creator>Lin, Jian</creator><creator>Yuan, Wei</creator><creator>Gu, Weibing</creator><creator>Wu, Xinzhou</creator><creator>Cui, Zheng</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-1174-4780</orcidid></search><sort><creationdate>20170626</creationdate><title>The elastic microstructures of inkjet printed polydimethylsiloxane as the patterned dielectric layer for pressure sensors</title><author>Peng, Yongyi ; Xiao, Shugang ; Yang, Junliang ; Lin, Jian ; Yuan, Wei ; Gu, Weibing ; Wu, Xinzhou ; Cui, Zheng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c393t-75abc7c49c380b9ead13edfbcb14d4f62e6cc591974e1d27201f09dd6b8c0cb93</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Applied physics</topic><topic>Crosslinking</topic><topic>Dielectric properties</topic><topic>Dilution</topic><topic>Elastic properties</topic><topic>Ink jet printers</topic><topic>Inkjet printing</topic><topic>Mechanical properties</topic><topic>Modulus of elasticity</topic><topic>Polydimethylsiloxane</topic><topic>Precursors</topic><topic>Pressure sensors</topic><topic>Sensitivity</topic><topic>Sensors</topic><topic>Silicone resins</topic><topic>Stability</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Peng, Yongyi</creatorcontrib><creatorcontrib>Xiao, Shugang</creatorcontrib><creatorcontrib>Yang, Junliang</creatorcontrib><creatorcontrib>Lin, Jian</creatorcontrib><creatorcontrib>Yuan, Wei</creatorcontrib><creatorcontrib>Gu, Weibing</creatorcontrib><creatorcontrib>Wu, Xinzhou</creatorcontrib><creatorcontrib>Cui, Zheng</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Peng, Yongyi</au><au>Xiao, Shugang</au><au>Yang, Junliang</au><au>Lin, Jian</au><au>Yuan, Wei</au><au>Gu, Weibing</au><au>Wu, Xinzhou</au><au>Cui, Zheng</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The elastic microstructures of inkjet printed polydimethylsiloxane as the patterned dielectric layer for pressure sensors</atitle><jtitle>Applied physics letters</jtitle><date>2017-06-26</date><risdate>2017</risdate><volume>110</volume><issue>26</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>A direct inkjet printing process was developed to fabricate patterned elastic microstructures for pressure sensors using n-butyl acetate diluted polymethylsiloxane (PDMS). The diluted PDMS precursor mixture with a cross-linker exhibited a controllable viscosity below 14 cP in 48 h at 25 °C, and the PDMS film had lower elastic modulus and hardness values than the non-diluted PDMS precursor after curing. The capacitor using the printed PDMS film as the microstructured dielectric layer showed a very high pressure sensitivity of up to 10.4 kPa−1 under the pressure below 70 Pa, and the pressure sensitivity would be dramatically decreased to 0.043–0.052 kPa−1 under the pressure between 2 and 8 kPa. Furthermore, the triboelectric sensors could be structured with an inkjet printed PDMS film and controllably generate the voltage signals up to 1.23 V without any amplification. The results suggest that mechanical properties and patterned elastic microstructures play the key roles in PDMS-based sensor devices, and the PDMS dielectric layer with controlled mechanical properties and microstructures fabricated via directly inkjet printing opens up the applications of the PDMS and its composites in functional devices.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/1.4990528</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0002-1174-4780</orcidid></addata></record> |
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subjects | Applied physics Crosslinking Dielectric properties Dilution Elastic properties Ink jet printers Inkjet printing Mechanical properties Modulus of elasticity Polydimethylsiloxane Precursors Pressure sensors Sensitivity Sensors Silicone resins Stability |
title | The elastic microstructures of inkjet printed polydimethylsiloxane as the patterned dielectric layer for pressure sensors |
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