The elastic microstructures of inkjet printed polydimethylsiloxane as the patterned dielectric layer for pressure sensors

A direct inkjet printing process was developed to fabricate patterned elastic microstructures for pressure sensors using n-butyl acetate diluted polymethylsiloxane (PDMS). The diluted PDMS precursor mixture with a cross-linker exhibited a controllable viscosity below 14 cP in 48 h at 25 °C, and the...

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Veröffentlicht in:Applied physics letters 2017-06, Vol.110 (26)
Hauptverfasser: Peng, Yongyi, Xiao, Shugang, Yang, Junliang, Lin, Jian, Yuan, Wei, Gu, Weibing, Wu, Xinzhou, Cui, Zheng
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container_end_page
container_issue 26
container_start_page
container_title Applied physics letters
container_volume 110
creator Peng, Yongyi
Xiao, Shugang
Yang, Junliang
Lin, Jian
Yuan, Wei
Gu, Weibing
Wu, Xinzhou
Cui, Zheng
description A direct inkjet printing process was developed to fabricate patterned elastic microstructures for pressure sensors using n-butyl acetate diluted polymethylsiloxane (PDMS). The diluted PDMS precursor mixture with a cross-linker exhibited a controllable viscosity below 14 cP in 48 h at 25 °C, and the PDMS film had lower elastic modulus and hardness values than the non-diluted PDMS precursor after curing. The capacitor using the printed PDMS film as the microstructured dielectric layer showed a very high pressure sensitivity of up to 10.4 kPa−1 under the pressure below 70 Pa, and the pressure sensitivity would be dramatically decreased to 0.043–0.052 kPa−1 under the pressure between 2 and 8 kPa. Furthermore, the triboelectric sensors could be structured with an inkjet printed PDMS film and controllably generate the voltage signals up to 1.23 V without any amplification. The results suggest that mechanical properties and patterned elastic microstructures play the key roles in PDMS-based sensor devices, and the PDMS dielectric layer with controlled mechanical properties and microstructures fabricated via directly inkjet printing opens up the applications of the PDMS and its composites in functional devices.
doi_str_mv 10.1063/1.4990528
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source AIP Journals Complete; Alma/SFX Local Collection
subjects Applied physics
Crosslinking
Dielectric properties
Dilution
Elastic properties
Ink jet printers
Inkjet printing
Mechanical properties
Modulus of elasticity
Polydimethylsiloxane
Precursors
Pressure sensors
Sensitivity
Sensors
Silicone resins
Stability
title The elastic microstructures of inkjet printed polydimethylsiloxane as the patterned dielectric layer for pressure sensors
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