Enhancement of superconductivity in NbN nanowires by negative electron-beam lithography with positive resist

We performed comparative experimental investigation of superconducting NbN nanowires which were prepared by means of positive- and negative electron-beam lithography with the same positive tone Poly-methyl-methacrylate (PMMA) resist. We show that nanowires with a thickness 4.9 nm and widths less tha...

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Veröffentlicht in:	Journal of applied physics 2017-08, Vol.122 (8)
Hauptverfasser:	Charaev, I., Silbernagel, T., Bachowsky, B., Kuzmin, A., Doerner, S., Ilin, K., Semenov, A., Roditchev, D., Vodolazov, D. Yu, Siegel, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Critical current (superconductivity) Electron beam lithography Nanowires Niobium nitride Performance measurement Physics Polymethyl methacrylate Superconductivity Thickness
Online-Zugang:	Volltext
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